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The Bede D3 system represents one of
the most advanced instruments for diffraction analysis of
semiconductor and other materials. It is designed to use a
variety of x-ray optics ranging from slits to multiple reflection
perfect crystals which can be easily switched from low- to
high-resolution applications. The Bede D3 is driven by
an extraordinary drive system which employs state-of-the-art DC
torque motors and inductive position encoders to achieve a
precision of 0.055 arcseconds with an absolute accuracy of better
than 2 arcseconds over a full range of 360°. This performance is
achieved with zero backlash and with a maximum slew speed of
15°/sec. The rapidly interchangeable optics of the D3
(being able to switch from high resolution multiple reflection
monochromator and analyzer crystals to low resolution slits in a
matter of minutes) coupled with the remarkable direct drive
system makes the Bede system unsurpassed in a multiple user
research environment. Diverse analyses such as double crystal
rocking curve analyses, high resolution triple crystal reciprocal
space mapping, surface reflectivity measurements and analyses of
thin polycrystalline films can all be routinely handled with the
Bede D3 system. It is equipped with an extended
dynamic range (EDR) detector, which has a specified linear
dynamic range of 107 (0.15 counts/sec to 1.5´ 106
counts/sec). The Bede D3 system works in conjunction
with a high flux (18 kW) direct-drive Rigaku rotating anode x-ray
generator; the high x-ray intensities that can be achieved with
this generator makes our diffraction system capable of analyzing
virtually any single crystal or polycrystalline material.
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