The system consists of an electrochemical capacitance-voltage (C-V) measurement system (Biorad) which permits carrier concentration determination via C-V measurement as a function of depth in the sample. In this apparatus, the traditional metal Schottky-metal ohmic contact for the C-V measurement is replaced by a conductive electrolyte solution. Variation of the voltage on the electrolyte cell leads to dissolution of the semiconductor, so that the semiconductor may be repetitively etched and measured, leading to a highly accurate measurement of carrier concentration versus depth in the sample. This apparatus greatly improves the ease of obtaining experimental doping calibrations by permitting the continuous determination of doping concentration in a single semiconductor sample grown with step changes in deposition conditions.