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  Low-Energy Electron Microscope  
 

 

The LEEM is a state-of-the-art electron microscope designed for high-resolution, real-time high temperature imaging and diffraction from surfaces during surface processes such as of thin-film growth or adsorption. Scanning electron microscopy and photo-emission electron microscopy capabilities make it possible to have in-situ in one experiment an observable lateral size scale from ~30 nm to visible with monolayer depth resolution. Fewer than 10 LEEMS exist world-wide.

LEEM Image of Si (001) surface The white and black features you see are atomically flat "terraces" of silicon separated by an atomic "step". To better understand the image, imagine standing at the top of a staircase with each stairstep only a single silicon atom high and each step alternately painted black and white. The image above is like this, stepping down the black-and-white staircase as you go down the image. We can learn much from images and movies of LEEM data. For example, one can learn a great deal by studying the motion of the steps and terraces at different conditions. On a larger scale, this knowledge may then be put to use in developing new techniques to make smaller, faster, and more powerful computers.

Some Technical Data:
Field of View: 4 microns
Imaging Condition: Dark-field using a half-order LEED diffraction beam
Electron Energy: About 5 eV
Surface Plane: nominally (001)

This facility is available for collaborative research projects with the investigators in IRG 1. Contact: M.G. Lagally, lagally@engr.wisc.edu.

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