 UW-Madison MRSEC |
Reflection High-Energy Electron diffraction (RHEED) and Reflection High-Energy Electron Loss Spectroscopy (RHEELS) |
 The evolution of structure and morphology during CVD can be
followed dynamically with the high-pressure RHEED system. This capability offers a direct
window into atomistic processes occurring during CVD. For example, changes in growth-mode
(e.g., cluster formation), surface structure, and surface roughness are all reflected in
the quality of the RHEED pattern. With the recent addition of a RHEELS analyzer, surface
composition can be determined from core-level loss features. In addition, energy filtered
RHEED, discriminating against high-energy inelastic scattering, will allow for a
quantitative determination of surface roughness.
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