The Zeiss CrossBeam is an instrument that combines an ultra high resolution GEMINI field emission column with a high performance Canion FIB column in one integrated system. The 1540XB CrossBeam® workstation is the perfect solution for three-dimensional analysis with no compromises on SEM imaging capabilities. The unique live SEM imaging capability of the 1540XB CrossBeam® during FIB operation mode gives full control when analyzing critical samples. The superior super-eucentric stage with Windows® control system makes the 1540XB CrossBeam® a versatile research tool.

This instrument has greatly improved TEM sample preparation capabilities in the Materials Science Center, and also provides support for various MEMS and micromachining procedures.

Options available on this instrument include a multi-channel gas injection system, fast beam blanker, Nabity e-beam writing system, in-situ micromanipulator, STEM detector and Inlens Back Scattered Electron detector.

The Zeiss CrossBeam is housed in the Materials Science Center located in the Materials Science and Engineering Building.

Rick Noll is responsible for the instrument.
noll@engr.wisc.edu
608-263-3667